Operational Status | ● Online | |||||||||||||||
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Description |
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The standard operating procedure for this tool is loaded into the PC that supports the ICP etcher. |
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Location | FabLab |
ETCH Tunnel
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Manufacturer |
Oxford Instruments |
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Staff Contact |
![]() tcl@umd.edu 301-405-3642 |
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Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
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Reservations | No upcoming reservations at this time. | |||||||||||||||
Logs |
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SOPs |
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Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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Recipes | Oxford Etch RecipesAL2O3ICP180_BCl3-HBr.doc (48 KB)AlGaN_GaN Etch Recipe.tif (225.63 KB) GaAs_AlGaAs Etch Recipe.tif (277.68 KB) InP Etch Recipe.tif (223.57 KB) MgO Etch Recipe.doc (27.5 KB) |