November 20, 2017 UMD Home FabLab AIMLab
Back to Equipment List Oxford ICP Etcher(Chlorine)
Description This Oxford Plasmalab System 100 is an Inductively Coupled Plasma (ICP) reactive ion etcher. Gases plumbed to the system include:
  • Cl2, O2
  • SiCl4, SF6
  • CH4, Ar
  • H2, N2
This etcher is used primarily for etching III-V materials and aluminum.

The standard operating procedure for this tool is loaded into the PC that supports the ICP etcher.
Location FabLab | ETCH Tunnel
Manufacturer Oxford Instruments
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Discussion Link Etching Discussion Page
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Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Sat, Nov 18, 2017
2:45 pm - 3:00 pm
David Shahin
View Reservation
Fri, Nov 17, 2017
6:15 pm - 6:30 pm
David Shahin
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Thu, Nov 16, 2017
2:00 pm - 3:00 pm
Aziz Karasahin
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Thu, Nov 16, 2017
7:00 am - 9:00 am
Aziz Karasahin
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Wed, Nov 15, 2017
10:30 am - 1:00 pm
Mijin Kim
View Reservation
Records to show:
SOPs
Oxford Chlorine Etcher SOP.pdf (384 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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