Operational Status | ● Online | ||||||||||||||||
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Description |
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Location | FabLab |
CVD Tunnel
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Manufacturer |
Oxford Instruments PlasmaLab System 100 Link |
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Staff Contact |
![]() tcl@umd.edu 301-405-3642 |
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Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
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Reservations |
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Logs |
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SOPs |
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Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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Recipes | PECVD RecipesHigh Quality SiON PECVD.tif (96.05 KB)High Qulaity SiO2 PECVD.tif (78.22 KB) SiNx PECVD.tif (102.04 KB) TEOS based SiO2 PECVD.tif (100.2 KB) a-Si PECVD.tif (74.76 KB) a-Si_PECVD.txt (845 B) |