June 1, 2026 UMD Home FabLab AIM Lab
March O2 plasma system Back to Equipment List
Operational Status ● Online
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Thu, May 28, 2026
12:45 pm - 1:00 pm
Bibek Ramdam
View Reservation
Wed, May 27, 2026
1:45 pm - 2:00 pm
Sheng-Wei Wang
View Reservation
Wed, May 27, 2026
9:30 am - 11:30 am
Rosalin Mohanty
View Reservation

Deleted by: Mark Lecates

Cr, Au 250 angstroms $75
Tue, May 26, 2026
5:00 pm - 5:30 pm
Theodore Browning Gifford
View Reservation
Thu, May 21, 2026
9:00 am - 9:15 am
Kellen O'Brien
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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