June 30, 2025 UMD Home FabLab AIM Lab
March O2 plasma system Back to Equipment List
Operational Status ● Online
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations
Date Start End User
07/01/2025 09:00 AM 09:30 AM Florence Lucey
Logs
Tue, Jul 01, 2025
9:00 am - 9:30 am
Florence Lucey
View Reservation
Mon, Jun 30, 2025
8:30 am - 8:45 am
Dhanu Chettri
View Reservation
Fri, Jun 27, 2025
12:15 pm - 1:00 pm
Florence Lucey
View Reservation

Deleted by: Florence Lucey

Fri, Jun 27, 2025
11:45 am - 12:15 pm
Kidus Guye
View Reservation
O2 plasm of silicon sample
Fri, Jun 27, 2025
11:00 am - 11:15 am
Konstantin Davydov
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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