July 11, 2025 UMD Home FabLab AIM Lab
March O2 plasma system Back to Equipment List
Operational Status ● Online
Description The March Photoresist Stripper- Trion can be used as an alternative.
Location FabLab | Photo Tunnel
Manufacturer March Jupiter III
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
No Charge
$0/hr
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
Reservations No upcoming reservations at this time.
Logs
Wed, Jul 09, 2025
12:00 pm - 12:15 pm
Sheng-Wei Wang
View Reservation
Fri, Jul 04, 2025
12:00 pm - 12:15 pm
Sheng-Wei Wang
View Reservation
Thu, Jul 03, 2025
4:15 pm - 4:30 pm
Yi-Siou Huang
View Reservation
Thu, Jul 03, 2025
1:30 pm - 1:45 pm
Ti Xie
View Reservation
Thu, Jul 03, 2025
10:00 am - 10:15 am
Sheng-Wei Wang
View Reservation
Records to show:
SOPs
index.php (38 B)
photo-11_sop_march_photoresist_plasma_system.pdf (2.78 MB)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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