| Description |
The March Photoresist Stripper is used to remove photoresist residue. Plumbed with both CF4 and O2, the March is an aggressive etcher for any organic material. |
|||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Location | FabLab |
Photo Tunnel
|
|||||||||||||||
| Manufacturer |
March Jupiter III |
|||||||||||||||
| Staff Contact |
 Thomas Loughrantcl@umd.edu 301-405-3642 |
|||||||||||||||
| Discussion Link | Lithography Discussion Page Login Help |
|||||||||||||||
| Rates | UMD $71/hr External Non-profit / University $108/hr Small Commercial / MTECH $236.25/hr Large Commercial $300/hr |
|||||||||||||||
| Reservations | No upcoming reservations at this time. Please login to make a reservation. |
|||||||||||||||
| Logs |
|
|||||||||||||||
| SOPs |
|
|||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
|||||||||||||||
| Recipes |
