| Operational Status | ● Online | |||||||||||||||
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| Description |
The Tystar furnace has three dedicated tubes for the growth/deposition of: gate-quality silicon dioxide, LPCVD polysilicon, LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Bare silicon wafers only please! Furnace is for FabLab staff use only. 4 hour minimum charge. Reservations must cover the ENTIRE PROCESS TIME (not just the growth specification). Hourly charge rates have been adjusted to account for process time *inclusive* of recipe length, to ensure that users are charged an effective rate that reflects only their process growth time. |
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| Location | FabLab |
CVD Tunnel
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| Manufacturer |
Tystar Tytan Link |
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| Staff Contact |
 Daniel Lewisdlewis17@umd.edu 301-405-5018 |
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| Rates | No Charge $0/hr Large Commercial $242/hr UMD $81/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr |
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| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
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| SOPs | ||||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
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| Recipes |
