September 23, 2017 UMD Home FabLab AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:
  • gate-quality silicon dioxide
  • LPCVD polysilicon
  • LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Staff Contact ThomasThomas Loughran
Discussion Link Deposition Discussion Page
Login Help
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Fri, Sep 08, 2017
7:00 pm - 8:00 pm
Jiahao Zhan
View Reservation
1000A of LS Nitride 6:1
Fri, Aug 18, 2017
1:00 pm - 2:30 pm
Subhojit Dutta
View Reservation
2000A of Si3N4 on 1, 3" silicon wafer
Tue, Aug 15, 2017
1:00 pm - 4:00 pm
Cameron Harner
View Reservation
1.1um of thermal wet oxide on 10, 4" wafers
Wed, Aug 02, 2017
10:30 am - 10:30 am
Subhojit Dutta
View Reservation
2.9KA of thermal wet oxide on 4, 3" Si wafers
Thu, Jul 27, 2017
1:00 pm - 2:00 pm
Shengjie Xie
View Reservation
1000A of LPCVD Nitride
Records to show:

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland