May 26, 2022 UMD Home FabLab AIMLab
Operational Status ‚óŹ Online
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Mon, May 23, 2022
10:30 am - 12:30 pm
Haotian Wang
View Reservation
Poly Deposition.
Wed, May 18, 2022
10:00 am - 12:00 pm
Haotian Wang
View Reservation
5000A of wet oxide
Thu, May 12, 2022
11:00 am - 1:00 pm
Sheron Lian
View Reservation
3000A of Nitride
Fri, May 06, 2022
10:00 am - 12:00 pm
Haotian Wang
View Reservation
1000A of Poly on 2, 3" wafers.
Mon, Apr 25, 2022
1:00 pm - 3:00 pm
Yang Zhang
View Reservation
2000A of Nitride on 1, 4" Si wafer and 2, Quartz disks.
Records to show:
SOPs
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Join Email List
Contact Us
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2022