May 31, 2023 UMD Home FabLab AIMLab
Operational Status ‚óŹ Online
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, May 25, 2023
7:00 am - 9:00 am
Yang Zhang
View Reservation
3000A of Si3N4
Tue, May 09, 2023
8:00 am - 10:00 am
Maxwell Xuan
View Reservation
Silicon Nitride deposition
Wed, Apr 26, 2023
9:30 am - 11:30 am
Fow-Sen Choa
View Reservation
Poly deposition
Wed, Apr 26, 2023
7:00 am - 9:00 am
Kidus Guye
View Reservation
Oxide growth
Thu, Apr 13, 2023
8:00 am - 10:00 am
Mitchell Gross
View Reservation
6000A of Poly
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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