May 26, 2022 UMD Home FabLab AIMLab
Operational Status ‚óŹ Online
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Mon, May 23, 2022
10:30 am - 12:30 pm
Haotian Wang
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Poly Deposition.
Wed, May 18, 2022
10:00 am - 12:00 pm
Haotian Wang
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5000A of wet oxide
Thu, May 12, 2022
11:00 am - 1:00 pm
Sheron Lian
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3000A of Nitride
Fri, May 06, 2022
10:00 am - 12:00 pm
Haotian Wang
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1000A of Poly on 2, 3" wafers.
Mon, Apr 25, 2022
1:00 pm - 3:00 pm
Yang Zhang
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2000A of Nitride on 1, 4" Si wafer and 2, Quartz disks.
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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