February 25, 2018 UMD Home FabLab AIMLab
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:
  • gate-quality silicon dioxide
  • LPCVD polysilicon
  • LPCVD silicon nitride
The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please!

This furnace is for FabLab staff use only.
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Link
Staff Contact ThomasThomas Loughran
tcl@umd.edu
301-405-3642
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$300/hr
Reservations No upcoming reservations at this time.
Please login to make a reservation.
Logs
Wed, Feb 14, 2018
7:00 am - 8:30 am
Shangjie Yu
View Reservation
500A of dry oxide on 25, 4" Si wafers.
Thu, Jan 18, 2018
7:00 am - 8:00 am
Jessie Zhang
View Reservation
200A of dry oxide on 12, 4" Si wafers for Luke Robertson. LPS
Wed, Jan 17, 2018
9:30 am - 10:30 am
Xinyuan Chong
View Reservation
1000A of Nitride.
Wed, Jan 17, 2018
7:00 am - 8:00 am
Jessie Zhang
View Reservation
6600A of Poly Silicon.
Fri, Jan 12, 2018
10:30 am - 11:00 am
Yiwen Hu
View Reservation
400A of ST Nitride on 2, 4" wafers with thermal oxide.
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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