May 31, 2023 UMD Home FabLab AIMLab
Operational Status ‚óŹ Online
Description The Tystar furnace has three dedicated tubes for the growth/deposition of:gate-quality silicon dioxide,LPCVD polysilicon,LPCVD silicon nitride

The furnace tubes can accommodate batches of up to 25 three or four inch silicon wafers per run. Virgin silicon wafers only please! Furnace is for FabLab staff use only.

30 minute minimum charge
Location FabLab | CVD Tunnel
Manufacturer Tystar Tytan
Staff Contact ThomasThomas Loughran
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Thu, May 25, 2023
7:00 am - 9:00 am
Yang Zhang
View Reservation
3000A of Si3N4
Tue, May 09, 2023
8:00 am - 10:00 am
Maxwell Xuan
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Silicon Nitride deposition
Wed, Apr 26, 2023
9:30 am - 11:30 am
Fow-Sen Choa
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Poly deposition
Wed, Apr 26, 2023
7:00 am - 9:00 am
Kidus Guye
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Oxide growth
Thu, Apr 13, 2023
8:00 am - 10:00 am
Mitchell Gross
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6000A of Poly
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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