May 26, 2018 UMD Home FabLab AIMLab
Back to Equipment List Parylene Coater
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Staff Contact MarkMark Lecates
External Non-profit / University
Small Commercial / MTECH
Large Commercial
Reservations No upcoming reservations at this time.
Wed, May 23, 2018
10:45 am - 12:15 pm
Abraham Chen
View Reservation
Mon, May 14, 2018
3:30 pm - 5:00 pm
Abraham Chen
View Reservation
Wed, May 09, 2018
3:00 pm - 5:30 pm
Abraham Chen
View Reservation
Wed, May 09, 2018
10:30 am - 12:30 pm
Abraham Chen
View Reservation

Deleted by: Abraham Chen

Mon, Mar 19, 2018
7:15 pm - 9:15 pm
Pradeep Ramiah Rajasekaran
View Reservation
1 gram of parylene- 1micron
Records to show:
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.


Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Follow us on TwitterTwitter logo

Links Privacy Policy

Copyright The University of Maryland University of Maryland