March 24, 2023 UMD Home FabLab AIMLab
Parylene Coater Back to Equipment List
Operational Status ‚óŹ Online
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Staff Contact MarkMark Lecates
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Reservations No upcoming reservations at this time.
Mon, Mar 13, 2023
1:45 pm - 3:45 pm
Ziyi Wang
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Fri, Mar 10, 2023
10:30 am - 12:00 pm
Ziyi Wang
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Thu, Mar 09, 2023
9:00 am - 11:30 am
Brian Holt
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Wed, Mar 08, 2023
4:00 pm - 5:30 pm
Ziyi Wang
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Tue, Mar 07, 2023
2:00 pm - 3:30 pm
Ziyi Wang
View Reservation
Records to show:
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)

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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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