November 20, 2017 UMD Home FabLab AIMLab
Back to Equipment List Parylene Coater
Description The Parylene Deposition System Model 2010 is a vacuum system used for the sublimation and subsequent deposition of Parylene onto a silicon wafer (or other vacuum compatible substrate). Up to three 4-inch wafers, or one 6-inch wafer can be processed at one time. Only trained and approved users may use this machine.
Location FabLab | Exploratory Lab
Manufacturer SCS Equipment PDS 2010 Labcoter 2
Link
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Discussion Link Deposition Discussion Page
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Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
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Logs
Thu, Nov 16, 2017
12:00 pm - 1:30 pm
Pradeep Ramiah Rajasekaran
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Deleted by: Pradeep Ramiah Rajasekaran

1.5 grams of Parylene
Tue, Nov 14, 2017
2:00 am - 3:30 am
Pradeep Ramiah Rajasekaran
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1 gram parylene
Mon, Nov 13, 2017
8:00 pm - 9:30 pm
Pradeep Ramiah Rajasekaran
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2 gram parylene
Mon, Nov 13, 2017
1:00 pm - 2:30 pm
Pradeep Ramiah Rajasekaran
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2 micron parylene
Fri, Nov 10, 2017
- 1:30 am
Pradeep Ramiah Rajasekaran
View Reservation
Records to show:
SOPs
Paralene coater SOP Rev-1.pdf (202.65 KB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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