February 25, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$50/1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt Handles up to five 4" diameter substrates Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
02/26/2018 09:00 AM 11:00 AM Mark Lecates

Please login to make a reservation.
Logs
Mon, Feb 26, 2018
9:00 am - 11:00 am
Mark Lecates
View Reservation
Ti Au 150nm Au Gold charge=
Fri, Feb 23, 2018
1:00 pm - 4:00 pm
Shahriar Aghaeimeibodi
View Reservation

Deleted by: Shahriar Aghaeimeibodi

50 nm Gold
Fri, Feb 23, 2018
10:00 am - 12:00 pm
Kevin Palm
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Deleted by: Kevin Palm

Ni + 5nm Pd +$1.50
Thu, Feb 22, 2018
5:30 pm - 7:30 pm
Kevin Palm
View Reservation
100 nm Ni + 5 nm Pd = $1.50
Thu, Feb 22, 2018
4:00 pm - 5:30 pm
Tarun Narayan
View Reservation
Pd 200nm $60
Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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