DEP-07: Angstrom NexDep Ebeam evaporator

December 20, 2025 UMD Home FabLab AIM Lab

Angstrom NexDep Ebeam evaporator Back to Equipment List

Operational Status

● Offline

Description

The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.

This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals.

Precious metals surcharge(10/11): Au: $200 per 1000A Pt: $100 per 1000A Pd-$110 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates

Location

FabLab | Dep Tunnel

Manufacturer

Angstrom

Staff Contact

Mark Lecates
mlecates@umd.edu
301-405-5197

Rates

Large Commercial

$242/hr

Small Commercial / MTECH

$166/hr

External Non-profit / University

$126/hr

UMD

$81/hr

No Charge

$0/hr

Reservations

Date	Start	End	User
12/22/2025	10:15 AM	02:00 PM	Jacqueline Hines

Logs

	Mon, Dec 22, 2025 10:15 am - 2:00 pm Jacqueline Hines View Reservation	M1009 Ti/Al deposition
	Fri, Dec 19, 2025 2:00 pm - 5:00 pm Jacqueline Hines View Reservation	Deleted by: Jacqueline Hines M1009 Ti/Al dep
	Wed, Dec 17, 2025 12:00 pm - 3:00 pm Ryan Purcell View Reservation	Deleted by: Ryan Purcell Cr/Au 10/300nm. Gold Charge = $600
	Tue, Dec 16, 2025 12:30 pm - 2:30 pm Ryan Purcell View Reservation
	Tue, Dec 16, 2025 10:30 am - 12:30 pm Justin Martin View Reservation	Training with Daniel Lewis

SOPs

Angstrom Rev-1.pdf (1.35 MB)

index.php (38 B)

Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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DEP-07: Angstrom NexDep Ebeam evaporator

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