September 23, 2017 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$30/1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt Handles up to five 4" diameter substrates Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Discussion Link Deposition Discussion Page
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Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
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Logs
Sat, Sep 23, 2017
11:30 am - 1:30 pm
Aysanew Abate
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Deleted by: Aysanew Abate

Fri, Sep 22, 2017
6:00 pm - 8:00 pm
Wei-Lun Hsu
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Ag
Fri, Sep 22, 2017
3:30 pm - 6:00 pm
Lara Skibbie
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Fri, Sep 22, 2017
1:30 pm - 3:30 pm
Shengjie Xie
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Deleted by: Shengjie Xie

Fri, Sep 22, 2017
1:30 pm - 3:30 pm
Mark Lecates
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Deleted by: Mark Lecates

Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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