June 21, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom NexDep Ebeam evaporator
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition. Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03). Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$50/1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt Handles up to five 4" diameter substrates Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
06/22/2018 12:30 PM 02:30 PM Yang Zhang
06/22/2018 02:30 PM 06:30 PM Rodney Snyder
06/25/2018 08:15 AM 10:15 AM Aaron Green
Logs
Mon, Jun 25, 2018
8:15 am - 10:15 am
Aaron Green
View Reservation
Au Gold charge=$
Fri, Jun 22, 2018
2:30 pm - 6:30 pm
Rodney Snyder
View Reservation
100nm Au/5nm Ti
Fri, Jun 22, 2018
12:30 pm - 2:30 pm
Yang Zhang
View Reservation
Thu, Jun 21, 2018
2:30 pm - 6:00 pm
Wei-Lun Hsu
View Reservation
Ag
Wed, Jun 20, 2018
2:45 pm - 5:45 pm
YANGYI YAO
View Reservation
Au 100nm, Pt 80nm,surcharge $119
Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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