October 16, 2025 UMD Home FabLab AIM Lab
Angstrom NexDep Ebeam evaporator Back to Equipment List
Operational Status ● Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.


This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
No Charge
$0/hr
Reservations
Date Start End User
10/22/2025 06:00 AM 02:00 PM Mark Lecates
Logs
Wed, Oct 22, 2025
6:00 am - 2:00 pm
Mark Lecates
View Reservation
Fri, Oct 10, 2025
8:30 am - 10:00 am
Ryan Purcell
View Reservation
Ni
Thu, Oct 09, 2025
7:00 pm - 8:30 pm
Ryan Purcell
View Reservation
Overnight pump down
Thu, Oct 09, 2025
11:00 am - 2:00 pm
Mark Lecates
View Reservation
Tue, Oct 07, 2025
7:30 pm - 9:30 pm
Maxwell Xuan
View Reservation

Deleted by: Maxwell Xuan

Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

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Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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