| Operational Status | ● Online | |||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Description |
The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.
Precious metals surcharge(10/11): Au: $200 per 1000A Pt: $100 per 1000A Pd-$110 per1000 6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / PtHandles up to five 4" diameter substrates |
|||||||||||||||
| Location | FabLab |
Dep Tunnel
|
|||||||||||||||
| Manufacturer |
Angstrom |
|||||||||||||||
| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
|||||||||||||||
| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
|||||||||||||||
| Reservations |
|
|||||||||||||||
| Logs |
|
|||||||||||||||
| SOPs |
|
|||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
|||||||||||||||
| Recipes |
