May 31, 2023 UMD Home FabLab AIMLab
Angstrom NexDep Ebeam evaporator Back to Equipment List
Operational Status ‚óŹ Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time.


This system is currently configured for aluminum, gold, chromium, nickel ,platinum,silver,copper and titanium thin film deposition.
Check with the staff if you want to use any other metals. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator (DEP-03).

Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per1000

6 pocket electron beam source: -Al / Au / Cr / Ni / Ti / Pt
Handles up to five 4" diameter substrates
Substrate heating capability up too 200 deg.
Location FabLab | Dep Tunnel
Manufacturer Angstrom
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Wed, May 31, 2023
12:00 pm - 9:00 pm
Mital Patel
View Reservation

Deleted by: Nam Kim

Training with Nam, 1000C
Thu, May 25, 2023
12:00 pm - 1:00 pm
Daniel Lewis
View Reservation
Thu, May 18, 2023
11:00 am - 3:00 pm
Xinyan Xiang
View Reservation

Deleted by: Nam Kim

With Nam @800C
Wed, May 17, 2023
3:00 pm - 4:00 pm
Daniel Lewis
View Reservation
Wed, May 17, 2023
11:45 am - 1:45 pm
Mitchell Gross
View Reservation
Gold 250 nm $230 gold charge
Records to show:
SOPs
Angstrom Rev-1.pdf (1.35 MB)
index.php (38 B)
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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