May 31, 2023 UMD Home FabLab AIMLab
Tescan XEIA FEG SEM Back to Equipment List
Operational Status ● Online

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Staff Contact JiancunJiancun Rao
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Date Start End User
05/31/2023 08:00 AM 09:30 AM Abhijit Biswas
05/31/2023 09:30 AM 10:30 AM lex schultheis
05/31/2023 10:30 AM 12:30 PM Hanyu Liu
05/31/2023 12:30 PM 03:00 PM Aniqa Anjum
05/31/2023 05:00 PM 07:00 PM Fariba Islam
Mon, Jun 05, 2023
2:30 pm - 3:30 pm
Mohammad Habibur Rahaman
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Fri, Jun 02, 2023
3:00 pm - 4:00 pm
Amro Hassanein
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KFS# 4-310503
Fri, Jun 02, 2023
1:00 pm - 3:00 pm
Chong Yang
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Fri, Jun 02, 2023
10:00 am - 12:00 pm
mona abostate
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Thu, Jun 01, 2023
3:00 pm - 4:30 pm
Kyle Webb
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Gold Nanoparticles
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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