September 25, 2017 UMD Home FabLab AIMLab
Back to Equipment List Tescan XEIA FEG SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Discussion Link Metrology Discussion Page
Login Help
Rates
UMD
$45/hr
External Non-profit / University
$68/hr
Small Commercial / MTECH
$120/hr
Large Commercial
$155/hr
Reservations
Date Start End User
09/25/2017 02:00 PM 06:00 PM Yiwen Hu

Please login to make a reservation.
Logs
Mon, Sep 25, 2017
2:00 pm - 6:00 pm
Yiwen Hu
View Reservation
Fri, Sep 22, 2017
8:00 am - 9:00 am
Hua Xie
View Reservation
Thu, Sep 21, 2017
5:00 pm - 7:00 pm
Yaoyu Ren
View Reservation
Thu, Sep 21, 2017
2:00 pm - 5:00 pm
Yiwen Hu
View Reservation
Thu, Sep 21, 2017
12:00 pm - 2:00 pm
Shengjie Xie
View Reservation
Records to show:
SOPs
Manuals

You must have lab permissions to view the manuals.

Please login to view manuals or contact the lab staff to obtain permissions.

Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

Communicate Contact Us
Contact the Webmaster
Google+
Follow us on TwitterTwitter logo

Links Privacy Policy
Sitemap
RSS

Copyright The University of Maryland University of Maryland
2004-2017