May 26, 2022 UMD Home FabLab AIMLab
Tescan XEIA FEG SEM Back to Equipment List
Operational Status ● Online
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Rates
UMD
$48/hr
External Non-profit / University
$74/hr
Small Commercial / MTECH
$126/hr
Large Commercial
$165/hr
No Charge
$0/hr
Reservations
Date Start End User
05/26/2022 04:00 PM 05:00 PM Nam Kim
05/27/2022 11:00 AM 01:00 PM Shuke Li
05/27/2022 02:00 PM 03:30 PM Ching-En Ku
05/27/2022 03:30 PM 05:00 PM Yu Liu
05/31/2022 11:00 AM 12:00 PM mona abostate
Logs
Sat, Jun 18, 2022
-
Jiancun Rao
View Reservation
Electrical/HVAC Outage
Fri, Jun 17, 2022
6:00 pm -
Jiancun Rao
View Reservation
Electrical/HVAC Outage
Sat, Jun 11, 2022
-
Jiancun Rao
View Reservation
Electrical/HVAC Outage
Fri, Jun 10, 2022
6:00 pm -
Jiancun Rao
View Reservation
Electrical/HVAC Outage
Tue, May 31, 2022
11:00 am - 12:00 pm
mona abostate
View Reservation
SEM assisted by JCrao
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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