April 15, 2025 UMD Home FabLab AIMLab
Tescan XEIA FEG SEM Back to Equipment List
Operational Status ● Online
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact JiancunJiancun Rao
jcrao@umd.edu
301-405-0561
Rates
Large Commercial
$182/hr
Small Commercial / MTECH
$132/hr
External Non-profit / University
$81/hr
UMD
$52/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Tue, Apr 15, 2025
12:00 pm - 3:30 pm
Nicholas Lockhart
View Reservation
pk
Sun, Apr 13, 2025
-
Jiancun Rao
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Building Power Outage
Sat, Apr 12, 2025
-
Jiancun Rao
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Building Power Outage
Fri, Apr 11, 2025
4:00 pm -
Wen-An Chiou
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Building Power Outage
Fri, Apr 11, 2025
- 4:00 pm
Jiancun Rao
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Tescan Service (Drew Barnes)
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SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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