November 24, 2017 UMD Home FabLab AIMLab
Back to Equipment List Tescan XEIA FEG SEM
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Discussion Link Metrology Discussion Page
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Rates
UMD
$45/hr
External Non-profit / University
$68/hr
Small Commercial / MTECH
$120/hr
Large Commercial
$155/hr
Reservations No upcoming reservations at this time.
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Logs
Wed, Nov 22, 2017
8:00 am - 9:30 am
Hua Xie
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Tue, Nov 21, 2017
4:00 pm - 6:30 pm
Young Min Kim
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Tue, Nov 21, 2017
2:30 pm - 3:00 pm
Samuel Sturner
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assisted by JCRao
Tue, Nov 21, 2017
10:00 am - 11:00 am
Gang Li
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Tue, Nov 21, 2017
8:30 am - 9:30 am
Yonggang Yao
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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