May 26, 2022 UMD Home FabLab AIMLab
Tescan XEIA Plasma FIB/SEM Back to Equipment List
Operational Status ● Online
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
For External nonprofit/university users: 1st 10 hours in a billing cycle will be billed at $137/hour; any additional hours in that same billing cycle will be billed at $110/hour
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact Wen-AnWen-An Chiou
wachiou@umd.edu
301-405-0541
Rates
UMD
$95/hr
External Non-profit / University
$147/hr
Small Commercial / MTECH
$189/hr
Large Commercial
$248/hr
No Charge
$0/hr
Reservations
Date Start End User
05/27/2022 12:00 AM 12:00 AM Jiancun Rao
05/28/2022 12:00 AM 12:00 AM Jiancun Rao
05/29/2022 12:00 AM 12:00 AM Jiancun Rao
Logs
Tue, May 31, 2022
11:00 am - 12:00 pm
Hema Choudhary
View Reservation

Deleted by: Jiancun Rao

SEM assisted by JCRao
Tue, May 31, 2022
-
Jiancun Rao
View Reservation

Deleted by: Jiancun Rao

SEM is fully functional. Plasma FIB is not available.
Mon, May 30, 2022
-
Jiancun Rao
View Reservation

Deleted by: Jiancun Rao

SEM is fully functional. Plasma FIB is not available.
Sun, May 29, 2022
-
Jiancun Rao
View Reservation
SEM is fully functional. Plasma FIB is not available.
Sat, May 28, 2022
-
Jiancun Rao
View Reservation
SEM is fully functional. Plasma FIB is not available.
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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