May 31, 2023 UMD Home FabLab AIMLab
Tescan XEIA Plasma FIB/SEM Back to Equipment List
Operational Status ● Online

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
For External nonprofit/university users: 1st 10 hours in a billing cycle will be billed at $137/hour; any additional hours in that same billing cycle will be billed at $110/hour
Location AIM Lab | 1237E Kim Eng. Bldg.
Staff Contact JiancunJiancun Rao
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Date Start End User
05/31/2023 03:00 PM 05:00 PM MINSUNG BAEK
06/01/2023 10:00 AM 01:00 PM Daniela Fontecha
Thu, Jun 01, 2023
10:00 am - 1:00 pm
Daniela Fontecha
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FIB/SEM EDS assisted by JCRao
Wed, May 31, 2023
3:00 pm - 5:00 pm
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FIB/SEM EDS assisted by JCRao
Tue, May 30, 2023
2:00 pm - 4:30 pm
Jiyun Heo
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FIB assisted by JCRao
Thu, May 25, 2023
2:30 pm - 6:00 pm
Jiancun Rao
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Deleted by: Jiancun Rao

Thu, May 25, 2023
10:30 am - 4:30 pm
Todd Brintlinger
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FIB assisted by JCRao
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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