April 22, 2025 UMD Home FabLab AIMLab
Tescan XEIA Plasma FIB/SEM Back to Equipment List
Operational Status ● Online
Description

The world's first fully integrated Xe plasma source FIB with SEM enables extremely high ion currents up to 2.5 μA thus increasing sputtering rate more than 50 times compared to conventional Ga source FIB. This predetermines XEIA for milling big volumes of materials that were time consuming or impossible in the past.

The XEIA is a fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (SEM-FIB) column and also fully equipped with Gas Injection System (GIS) for five different gases. With more than 20 ports in the newly designed large sample chamber, the XEIA also integrates a variety of nano-analytical capabilities in one single instrument. The XEIA equipped with:

  • EDS (Energy Dispersive X-Ray Spectrometry)
  • CL (Cathodoluminescence)
For External nonprofit/university users: 1st 10 hours in a billing cycle will be billed at $159/hour; any additional hours in that same billing cycle will be billed at $128/hour
Location AIM Lab | 1237E Kim Eng. Bldg.
Manufacturer
Staff Contact JiancunJiancun Rao
jcrao@umd.edu
301-405-0561
Rates
Large Commercial
$273/hr
Small Commercial / MTECH
$198/hr
External Non-profit / University
$159/hr
UMD
$102/hr
No Charge
$0/hr
Reservations
Date Start End User
04/23/2025 12:00 AM 12:00 AM Wen-An Chiou
04/24/2025 12:00 AM 12:00 AM Wen-An Chiou
04/25/2025 12:00 AM 12:00 AM Wen-An Chiou
Logs
Fri, Apr 25, 2025
-
Wen-An Chiou
View Reservation
The XEIA FIB is out order.
Thu, Apr 24, 2025
-
Wen-An Chiou
View Reservation
The XEIA FIB is out order.
Wed, Apr 23, 2025
-
Wen-An Chiou
View Reservation
The XEIA FIB is out order.
Tue, Apr 22, 2025
-
Wen-An Chiou
View Reservation
The XEIA FIB is out order.
Mon, Apr 21, 2025
-
Wen-An Chiou
View Reservation
The XEIA FIB is out order.
Records to show:
SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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