March 26, 2025 UMD Home FabLab AIMLab
Operational Status ● Online
Description The Trion RIE is used to remove photoresist residue. Plumbed with O2,CF4,CHF3 and Sf6 the Etcher is an aggressive etcher for any organic material. Can be used to etch thin layers of SiO2 ,SiN and Si
Location FabLab | ETCH Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
No Charge
$0/hr
Reservations
Date Start End User
03/27/2025 10:00 AM 10:15 AM Chi Won Ahn
Logs
Thu, Mar 27, 2025
10:00 am - 10:15 am
Chi Won Ahn
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With nam
Tue, Mar 25, 2025
2:45 pm - 3:00 pm
Seungyeop Lee
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Tue, Mar 25, 2025
11:00 am - 11:30 am
Tahir Mahmud
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Mon, Mar 24, 2025
8:15 pm - 8:30 pm
Ziyi Wang
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Mon, Mar 24, 2025
3:30 pm - 4:00 pm
Tahir Mahmud
View Reservation
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SOPs
Manuals

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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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