May 31, 2023 UMD Home FabLab AIMLab
Angstrom Ebeam Evaporator PLC Driven -B Back to Equipment List
Operational Status ● Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per 1000Å
Location FabLab | Dep Tunnel
Staff Contact MarkMark Lecates
External Non-profit / University
Small Commercial / MTECH
Large Commercial
No Charge
Date Start End User
05/31/2023 09:00 AM 10:00 AM Daniel Lewis
05/31/2023 10:00 AM 12:00 PM Mark Lecates
05/31/2023 12:30 PM 03:00 PM Brendan Jordan
06/01/2023 02:30 PM 04:00 PM Maxwell Xuan
Thu, Jun 01, 2023
2:30 pm - 4:00 pm
Maxwell Xuan
View Reservation
Wed, May 31, 2023
12:30 pm - 3:00 pm
Brendan Jordan
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Wed, May 31, 2023
10:00 am - 12:00 pm
Mark Lecates
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Wed, May 31, 2023
9:00 am - 10:00 am
Daniel Lewis
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Tue, May 30, 2023
10:00 pm - 11:00 pm
Daniel Lewis
View Reservation
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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