March 26, 2025 UMD Home FabLab AIMLab
Angstrom Ebeam Evaporator PLC Driven -B Back to Equipment List
Operational Status ● Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(7/18): Au: $110 per 1000Å Pt: $100 per 1000Å Pd-$110 per 1000Å
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
Large Commercial
$242/hr
Small Commercial / MTECH
$166/hr
External Non-profit / University
$126/hr
UMD
$81/hr
No Charge
$0/hr
Reservations
Date Start End User
03/26/2025 06:15 PM 07:45 PM Maximilian Shen
03/27/2025 11:15 AM 03:30 PM Jay Easter
03/27/2025 05:00 PM 06:30 PM Haochen Yang
03/27/2025 08:00 PM 10:00 PM Maxwell Xuan
03/31/2025 09:30 AM 02:00 PM Jay Easter
Logs
Tue, Apr 01, 2025
9:00 am - 12:00 pm
Mark Lecates
View Reservation
Mon, Mar 31, 2025
9:30 am - 2:00 pm
Jay Easter
View Reservation
Mon, Mar 31, 2025
9:00 am - 12:00 pm
Mark Lecates
View Reservation

Deleted by: Mark Lecates

Thu, Mar 27, 2025
8:00 pm - 10:00 pm
Maxwell Xuan
View Reservation
Thu, Mar 27, 2025
5:00 pm - 6:30 pm
Haochen Yang
View Reservation
Au-50nm
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Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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