| Operational Status | ● Online | ||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Description |
The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator
Precious metals surcharge(7/18): Au: $200 per 1000Å Pt: $100 per 1000Å
Pd-$110 per 1000Å |
||||||||||||||||
| Location | FabLab |
Dep Tunnel
|
||||||||||||||||
| Manufacturer |
|
||||||||||||||||
| Staff Contact |
 Mark Lecatesmlecates@umd.edu 301-405-5197 |
||||||||||||||||
| Rates | Large Commercial $242/hr Small Commercial / MTECH $166/hr External Non-profit / University $126/hr UMD $81/hr No Charge $0/hr |
||||||||||||||||
| Reservations |
|
||||||||||||||||
| Logs |
|
||||||||||||||||
| SOPs | |||||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
||||||||||||||||
| Recipes |
