|Operational Status||● Online|
|Description||The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per 1000Å|
|Location||FabLab | Dep Tunnel|
External Non-profit / University
Small Commercial / MTECH
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