May 26, 2022 UMD Home FabLab AIMLab
Angstrom Ebeam Evaporator PLC Driven -B Back to Equipment List
Operational Status ● Online
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $92 per 1000A Pt: $70 per 1000A Pd-$82 per 1000Å
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$75/hr
External Non-profit / University
$116/hr
Small Commercial / MTECH
$158/hr
Large Commercial
$220/hr
No Charge
$0/hr
Reservations No upcoming reservations at this time.
Logs
Thu, May 26, 2022
10:45 am - 12:00 pm
Mark Lecates
View Reservation
Wed, May 25, 2022
1:45 pm - 2:45 pm
xiheng ai
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Wed, May 25, 2022
11:15 am - 1:15 pm
Ryan Purcell
View Reservation
Ti-Ni-Ti 10-50-5nm
Tue, May 24, 2022
9:00 pm - 11:00 pm
Yun Suk Eo
View Reservation
Ti/Au Gold 138 dollar
Mon, May 23, 2022
9:00 pm - 11:00 pm
Yun Suk Eo
View Reservation

Deleted by: Yun Suk Eo

Ti/Au Gold 193 dollar
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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