September 25, 2017 UMD Home FabLab AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$30/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Discussion Link Deposition Discussion Page
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Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
09/25/2017 12:00 PM 03:00 PM Yiwen Hu
09/25/2017 03:00 PM 05:00 PM David Shahin
09/25/2017 05:00 PM 07:30 PM Shengjie Xie

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Logs
Mon, Sep 25, 2017
5:00 pm - 7:30 pm
Shengjie Xie
View Reservation
Mon, Sep 25, 2017
3:00 pm - 5:00 pm
David Shahin
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100nm Al
Mon, Sep 25, 2017
12:00 pm - 3:00 pm
Yiwen Hu
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Mon, Sep 25, 2017
10:30 am - 12:00 pm
Shengjie Xie
View Reservation
Mon, Sep 25, 2017
8:30 am - 10:30 am
Jiahao Zhan
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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