January 21, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$30/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations
Date Start End User
01/22/2018 01:30 PM 04:00 PM Aziz Karasahin

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Logs
Tue, Jan 23, 2018
10:30 am - 2:30 pm
Lunet Luna
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Deleted by: Lunet Luna

Au charge - $126 for 2000A Au; Ti/Au
Tue, Jan 23, 2018
7:00 am - 10:30 am
Lunet Luna
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Deleted by: Lunet Luna

Au charge - $50.40 for 800A Au; Ti/Al/Ni/Au
Mon, Jan 22, 2018
1:30 pm - 4:00 pm
Aziz Karasahin
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Mon, Jan 22, 2018
7:00 am - 12:00 pm
Mark Lecates
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Deleted by: Mark Lecates

class wafers 5000
Sat, Jan 20, 2018
2:15 pm - 4:30 pm
Kevin Palm
View Reservation
3000 angstrom Pt = $210
Records to show:
SOPs
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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