May 26, 2018 UMD Home FabLab AIMLab
Back to Equipment List Angstrom Ebeam Evaporator PLC Driven -B
Description The Angstrom Ebeam Evaporator is a six-pocket electron beam evaporator. It features a planetary carousel that can hold up to five 4inch substrates at a time. This system is currently configured for metal deposition. The system cannot be used for oxide or nitride films as these can be done in our Denton Evaporator Precious metals surcharge(10/11): Au: $63 per 1000A Pt: $70 per 1000A Pd-$50/1000
Location FabLab | Dep Tunnel
Manufacturer
Staff Contact MarkMark Lecates
mlecates@umd.edu
301-405-5197
Rates
UMD
$71/hr
External Non-profit / University
$108/hr
Small Commercial / MTECH
$150/hr
Large Commercial
$200/hr
Reservations No upcoming reservations at this time.
Logs
Fri, May 25, 2018
2:15 pm - 4:15 pm
Jiahao Zhan
View Reservation
Fri, May 25, 2018
10:00 am - 12:00 pm
Caleb Hammer
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Germanium Dot Deposition on Adhesive
Thu, May 24, 2018
6:00 pm - 8:15 pm
Yun Suk Eo
View Reservation
Ti/Au 30/1500 A Gold = $94.5
Thu, May 24, 2018
4:15 pm - 6:00 pm
Kevin Palm
View Reservation
2000 angstrom Au = $126
Thu, May 24, 2018
1:00 pm - 3:45 pm
Lisa Krayer
View Reservation
Aluminum
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SOPs
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Recipes

Colleges A. James Clark School of Engineering
The College of Computer, Mathematical, and Natural Sciences

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