This SEM operates under low-vacuum conditions to enable optical characterization of samples not possible with conventional SEMs (e.g., samples that readily charge). This microscope supports three vacuum modes, including conductor, standard, and in particular, a “charge-up reduction mode” that minimizes image artifacts due to charge-up. Both backscattered electron images and secondary electron images can be acquired, enabling the simultaneous acquisition of surface morphology and material compositional information. Accelerating voltages of 5 kV, 10 kV, and 15 kV enable the ability to tailor the resolution, image information (surface versus internal), and backscattered electron signal.

• The Tilt-Rotate Stage feature supports observation of samples from -15° to 30°, allowing for multi-dimensional views of sample surfaces.
• The integration of an Oxford AZtecOne EDS module allows for elemental analysis of samples inside the SEM to support microscale materials characterization and 3D mapping of mass distributions. The AZtecOne includes a 30 mm2 silicon drift detector (SDD) and a TruMap feature that separates multi-element spectra in real time (while subtracting background) to generate elemental maps without image contamination (e.g., due to overlapping peaks).

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