| Operational Status | ● Online | |||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Description |
This Oxford PlasmaPro 100 Cobra 300 is an Inductively Coupled Plasma (ICP) reactive ion etcher. Gases plumbed to the system include: Ar-O2-Sf6-BCL3-SiCl4-H2-CH4. This etcher is used primarily for etching GaAs and InP |
|||||||||||||||
| Location | FabLab |
ETCH Tunnel
|
|||||||||||||||
| Manufacturer |
|
|||||||||||||||
| Staff Contact |
 Nam Kimnsk0248@umd.edu 301-405-6664 |
|||||||||||||||
| Rates | Large Commercial $266/hr Small Commercial / MTECH $183/hr UMD $89/hr External Non-profit / University $139/hr No Charge $0/hr |
|||||||||||||||
| Reservations | No upcoming reservations at this time. | |||||||||||||||
| Logs |
|
|||||||||||||||
| SOPs | ||||||||||||||||
| Manuals | You must have lab permissions to view the manuals. Please login to view manuals or contact the lab staff to obtain permissions. |
|||||||||||||||
| Recipes |
