MSE Professor Recognized by AVS and Dry Process Symposium

Gottlieb Oehrlein - a professor in the Department of Materials Science and Engineering (MSE) at the University of Maryland (UMD) - has been selected to receive two awards this week:

• The John Thornton Memorial Award, bestowed by the American Vacuum Society, for his ground-breaking research on atomic layer etching of dielectric materials. First demonstrated in 2013, this research has had a significant world-wide impact, attracting researchers from key Japanese and Korean companies to spend sabbatical periods at UMD. Oehrlein has been invited to give a talk at the AVS 66th International Symposium awards ceremony on October 23rd in Columbus, Ohio.
• The DPS [International Symposium on Dry Process] Nishizawa Award, which is presented to individuals who make outstanding contributions to DPS, in addition to significant academic and technological achievements in the DPS field. Ohrlein will be honored at the 41st International Symposium on Dry Process to be held in Hiroshima, Japan, in November.  

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